This course covers the fundamentals of micro/nano processing and fabrication technologies for optoelectronic devices. Students will explore topics such as the thermodynamics and kinetics of growth and deposition, vacuum technology, deposition technologies, micro/nano characterization techniques, lithography, etching, implantation, and various control parameters of these processes. Additionally, the course will examine how micro/nano processing and fabrication relate to optoelectronic device performance and its applications. These devices are widely used in fields such as communications, transportation, environmental monitoring, aerospace applications, energy production, medical applications, and others.